KL91 Pressure Transmitter for Ultrapure Water of Semiconductor Production Appliances
KL91 Pressure Transmitter for Ultrapure Water of Semiconductor Production Appliances
2006.11NEW
This instrument is a pressure transmitter for the use of ultrapure water which uses all-fluorine resin for the wetted parts, and has small metal ion elution amount. It is designed for low and negative pressure measurement, as well
as minimizing pocket that may cause contamination. Features include IP65 enclosure and CE compliance (EMC
Directive Compliance) Applicable directive: 89/336/EEC
as minimizing pocket that may cause contamination. Features include IP65 enclosure and CE compliance (EMC
Directive Compliance) Applicable directive: 89/336/EEC
Certificate：
Feature
・The all-fluorine resin wetted parts consist of a fluorine resin film multilayer laminated onto a ceramic
diaphragm, and suppress the amount of metal ion elution and the generation of contamination.
・Compatible with pipe diameters with size up to 1” (In-line type)
・Incorporates capacitance sensor that has excellent temperature characteristics.
diaphragm, and suppress the amount of metal ion elution and the generation of contamination.
・Compatible with pipe diameters with size up to 1” (In-line type)
・Incorporates capacitance sensor that has excellent temperature characteristics.