GW__ Semiconductor Use
GW__ Semiconductor Use
The pressure gauge is designed for offering excellent performance even with highly pure semiconductor gas
process media or in environmental atmosphere surrounded by corrosive gas. The gauge is suitable for the use
in semiconductor process application, especially for highly-pure process media measurement with great care
of air-tightness and air-cleanliness.
process media or in environmental atmosphere surrounded by corrosive gas. The gauge is suitable for the use
in semiconductor process application, especially for highly-pure process media measurement with great care
of air-tightness and air-cleanliness.
Certificate：
Feature
・Primarily internal components (Bourdon tube, socket, case and movement etc.) are made of stainless steel
to resist to corrosion both against process media and environmental atmosphere.
・The wetted parts like pressure sensing element are welded by argon arc welding and manufactured under
strict quality controls inspecting proof pressure and air-tightness.
・The case is equipped with a blowout disc＊. In case the Bourdon tube were to rupture, it would avoid the
damage of front window.
＊To maximize performance, please select the pressure range with your common operating pressure should
be 30 to 65% of the pressure range. Furthermore, please ensure that the wetted parts materials listed are
suitable for the use against measuring gas or liquid.
to resist to corrosion both against process media and environmental atmosphere.
・The wetted parts like pressure sensing element are welded by argon arc welding and manufactured under
strict quality controls inspecting proof pressure and air-tightness.
・The case is equipped with a blowout disc＊. In case the Bourdon tube were to rupture, it would avoid the
damage of front window.
＊To maximize performance, please select the pressure range with your common operating pressure should
be 30 to 65% of the pressure range. Furthermore, please ensure that the wetted parts materials listed are
suitable for the use against measuring gas or liquid.