GW28 Pressure Gauge for Semiconductor Industry
GW28 Pressure Gauge for Semiconductor Industry
GW28 is designed for offering excellent performance even with highly pure semiconductor gas process media or
in environmental atmosphere surrounded by corrosive gas. The gauge is suitable for the use in semiconductor
process application, especially for highly-pure process media measurement with great care of air-tightness and
air-cleanliness.
in environmental atmosphere surrounded by corrosive gas. The gauge is suitable for the use in semiconductor
process application, especially for highly-pure process media measurement with great care of air-tightness and
air-cleanliness.
Certificate：
Feature
・Being a small diameter, 28 mm in size, this model contributes to space-saving by its integrated mounting.
・Since wetted part of GW28 consists of simple construction with diaphragm, unlike a conventional C-shaped
bourdon tube, cleaning and a gas flushing are easily available to user.
・Internal volume around wetted part is reduced to approximately half as compared to conventional small bourdon
tube type gauge eliminating pocket substantially preventing gas from staying at the part.
＊To maximize performance, please select the pressure range with your common operating pressure should be
30 to 65% of the pressure range. Furthermore, please ensure that the wetted parts materials listed are suitable
for the use against measuring gas or liquid.
・Since wetted part of GW28 consists of simple construction with diaphragm, unlike a conventional C-shaped
bourdon tube, cleaning and a gas flushing are easily available to user.
・Internal volume around wetted part is reduced to approximately half as compared to conventional small bourdon
tube type gauge eliminating pocket substantially preventing gas from staying at the part.
＊To maximize performance, please select the pressure range with your common operating pressure should be
30 to 65% of the pressure range. Furthermore, please ensure that the wetted parts materials listed are suitable
for the use against measuring gas or liquid.